Investigation of Plasma Parameters in a VHF Plasma With Narrow Gap Under High Gaseous Pressure
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Plasma Processes and Polymers
سال: 2009
ISSN: 1612-8850
DOI: 10.1002/ppap.200931901